一种新型MCM基板――阳极氧化多层基板 |
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| [摘要] |
| 采用电化学方法，对基板上的Al膜进行选择性阳极氧化，从而制得导带、通孔和介质，重复上述工序，便可制得多层布线基板。与常用多层布线基板，如MCM-C、MCM-D比较，它具有制作工艺简单独特、互连密度高，线径、间距和孔径更小，平面性好，绝缘电阻高等优点。 |
| [英文摘要] |
| Conductive tapes, vias, and dielectric layers can be made by anodize the selected area and multilayer substrates can be acquired by repeating the process. Compared with the conventional multilayer substrates, such as MCM-C and MCM-D, the substrate has following advantages: simpler process, higher interconnections density, higher line definition, better flatness and higher insulated resistance.(2 refs.) |
| [关键词] |
| 阳极氧化 多层布线基板 MCM |
| [作者] |
| 刘彤 |
| [作者单位] |
| (电子工业部第43研究所 合肥 230031) |
| [刊名] |
| 电子元件与材料 |
| [英文刊名] |
| ELECTRONIC COMPONENTS&MATERIALS |
| [期刊类别] |
| 无线电电子学与电信技术 |
| [年 卷 期] |
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1999 18 1 点击免费下载论文：一种新型MCM基板――阳极氧化多层基板 |